In this effort the residual strain in exposed negative tone sal 605 and unexposed positive tone apexe resists was characterized for a variety of processing conditions using surface micromachined bentbeam strain sensors fabricated with resist as the structural material. Contact tool owner through the helpdesk system for training before running heated. You dont have to wait for your prints, thanks a quick printout time and fast multipage copying. Home capabilities our equipment thin film stress measurement flx 2320 thin film stress measurement flx 2320 show section navigation. Element schematic diagram service manual circuit diagram wiring schema repair instruction guide user manual free pdf download. The front view of the flx 2320 instrument is shown in section 11. Flx flexus thin film stress measurement systems toho technology. Free element electronics flat panel television user manuals. Tencor flx 2320 thin film stress measurementtencor flx2320kla tencor jenesis metrology. A situation which could be potentially hazardous and could result in minor or moderate injury.
Characterization and metrology cleanroom research laboratory. Always completely disconnect the power cord from your chassis whenever you work with the hardware. The flx 2320 chuck can be suppled with room temp chuck or with optional hot chuck for stress monitoring at high temperature temperatures, and an optional cooling unit that allow a thorough understanding of film properties at temperatures from up to 500c. The cmi is a complex of clean rooms and processing equipment for the training and scientific experimentation devoted to the users of microtechnologies. Toho technology flx 2320 s toho technology flx 2320 s. On each wafer, the film thickness has a nonuniformity of less than 1%. It provides the user with a powerful set of system commands to control all disk operations directly from the users terminal. View and download element flx2210 user manual online. This is accomplished by first measuring the wafer curvature before the film is deposited and then remeasuring the curvature after the film is deposited. These measurements, which determine stress in the amorphous silicon oxide films, are sensitive to both plastic deformation and density changes. Toho flx2320s wavelength stress measurement cleanroom. Writing and editing instructions for use manuals, training manuals, and other documentation accompanying bioprofile products. This difference in curvature is used to calculate stress by way of stoneys equation, which relates the biaxial modulus of the substrate, thickness of the film and substrate, and the radius of curvatures of pre and postprocess. The flx2320 film stress measurement system provides accurate.
Taking the layer geometry, the wafer geometry, the intrinsic material properties of the substrate and the change of deflection into account, the stress of the coated layers can be determined by applying the stoney equation 28. Klatencor sp1 classic with single 200mm open cassette or single 300mm foup manufacturer. The flexuss thin film measurement systems from toho technology allow stress measurements in the temperature range 65 c up to 500 c. The flexus thin film stress measuring apparatus tfsma measures the changes in the radius of curvature of a substrate create by deposition of a stressed thin film on its surface. Find the user manual you need for your tv and more at manualsonline. For pluggable equipment, the power outlet shall be installed near the equipment. The blue and brown pcb connections must not be altered from factory setting.
Disconnect this equipment from ac outlet before cleaning. Fisher ca2320 manual stereo integrated amplifier hifi. The flx stress measurement system helps troubleshoot applications listed below. Mechanical properties and pattern collapse of chemically ampli. Canon maxify mb2320 windows user manual was written in english and published in pdf file portable document format. View and download element flx 3210 user manual online. A tencor flx 2320 was used to determine the deflections of polished siwafers 3. Scf series installation and operation manual phone. Zero 88 flx s lighting console user manual page 7 of 47 multifunction faders mffs the flx s lighting console is equipped with either flx s includes dedicated keys for commands 24 or 48 multifunction faders.
For ground and spacedbased applications, agcoated reflectors are indispensable because of their high reflectivity. A quantitative case study of such changes has been. Important operating and safety instructions save these instructions a before using the battery charger, read all the instructions in addition to the. Flexus 2320 film stress measurement system brumley south inc. An inert flush capability offers a controlled atmosphere in nitrogen or argon, preventing. The flexus 2320 equipment standard operating procedure kimberly appel 1. This checklist is a brief listing of the major items covered in this manual. It then compares the two measured curvatures to calculate the stress on the deposited film.
Page 20 of element electronics flat panel television flx2610 user guide go. The mechanical properties of positive tone chemically amplified resists uv6 and apexe are measured and used in finite element analysis fea to determine the mechanical compliance of photoresist lines as an indicator of the propensity for pattern collapse. It calculates film stress by measuring the change in radius of curvature of a substrate caused by the deposition of a thin film on the substrate. Reliably efficient, the maxify mb2320 printer is engineered for superb efficiency and productivity. This article is a contribution to the i mprovement of protected silver coatings for reflectors. If service is required, the manual should be readily available to aid in the troubleshooting process. Thin film stress measurement flx 2320 tofsims imaging spectrometer iontof gmbh tystar doped anneal. The flx2320 is a thin film stress instrument that uses a laser scanner to measure the changes in the radius of the curvature of the substrate caused by deposition of a thin film on a wafer. Document information um10237 lpc24xx user manual rev.
The flx 2320 is a thin film stress instrument that uses a laser scanner to measure the changes in the radius of the curvature of the substrate caused by deposition of a thin. The purpose of this user s guide is to provide the user of the flex operating system with the information required to make effective use of the available system commands and utilities. Tv and television manuals and free pdf instructions. Using the manual or the automated rotation option only available for the flexusr version, the. It takes on big jobs with ease, thanks to a highspeed, 50 sheet adf and two paper cassettes with a combined capacity of 500 sheets, or a full ream. Rigsync removes the need to understand dmx if your fixtures support rdm. My search did not turn up any links john deere ag new equipment. Laser scanning to measure stress on all reflecting films.
The procedure for creating the 3d deflection map can be found in the user manual section. Tencor flx2320 thin film stress measurement jenesis. Canon maxify mb2320 manual available online, you can read canon maxify mb2320. For normal stress measurement, the hot plate cover and thumbscrews are not used. Specifically, the residual strain is determined by surface micromachined resist structures.
An initial measurement reference, with no film, is required to calculate the deflection resulting from the thin film deposit. Canon maxify mb2320 windows user manual manual device. The flx2320s determines stress by measuring the curvature change of pre and postdeposition of the film. Only the cmi staff is qualified to do a service or to do maintenance. Element electronics flat panel television flx 2610. The user should keep this manual close at hand while becoming familiar with the system. The flx 2320 s is a thinfilm stress measurement instrument.
Element flx3210 user manual pdf download manualslib. Suss mask aligner ma6ma8 user manual for suss mask aligner ma6ma8 bottom side alignment using suss mask aligner ma6ma6 photoresist development and stripping liftoff procedure adhesion promotion creating pdms molds with su8 photoresist we recommend to use su8 spin calculator vacuum ovens. Element electronics flx2610 flat panel television user manual. Logon on the access control system on the zone computer to unlock the keyboard of the flx 2320 s 2. Scanning electron microscope zeiss evo ma10 nanofab. View and download element flx 3710 user manual online. Introduction the flex operating system is a very versatile and flexible operating system. Photograph of the toho technology flx 2320 stress measurement tool. Protected silver coatings for reflectors springerlink. User manual is located at the stress machine station. Learn how to assemble and ride an electric bike the right way. Folks i am trying to find a john deere 2420 manual.
Flexus 2320 stress gage, stresstest stanford nanofabrication facility. Film stress that occurs during coating processes leads to voids and cracking and thus constitutes one of the main causes for the failure of electronic parts. Christine newbold technical field applications scientist. The systems programmer will be delighted with the wide variety of disk. A laser scanner is used to measure the changes in the radius of curvature of the substrate caused by the deposition of a thin film on the wafer. View profile view forum posts silver member join date apr 2007 posts 108. Abut this manual ttis manual is a stepbystepguide that will acquaint youwith the systemnsfeatures and benefik, it defines the components and their functions, describes their operation, and acquaink you with normal and emergency procedures. Page 20 of element electronics flat panel television flx 2610 user guide. The transport, assembly, and storage of these reflectors take places over a long period before they are finally commissioned for application. Mechanical characterization of electronbeam resist using. Tencor flexus flx 2320 thinfilm stress measurement system. June 17th, 20 epflcmiphl page 1 sur 3 epfl cmi flx 2320 s warning only the cmi staff is qualified to do a service or to do maintenance user manual 1. We can help you with parts, nist calibration standards, manuals, answers to. The toho quickly performs measurements at user selectable orientations and temperatures and can be used.
For duv lithography process steps with the asml pas 5500350c stepper, cmi recommends to use wafers with the lowest possible total thickness variation ttv flx 2320 was used to determine the deflections of polished siwafers 3. The toho quickly performs measurements at user selectable orientations and temperatures and can be used for two dimensional stress mapping on wafers ranging from 200 mm diameter down to. Thinfilm stress measurement instrument that measures the changes in the radius of curvature of a wafer caused by the deposition of a stressed thin film. The structural relaxation of plasmaenhanced chemicalvapordeposited pecvd silanebased silicon oxide films during thermal cycling and annealing has been studied using wafer curvature measurements. Spec equipment our products buy refurbished klatencor. To endure this period without a decrease of reflectivity, protective coatings with a final layer, which offers a high resistance to. Tencor flexus flx 2320 thin film stress system price. The flexus 2320 equipment standard operating procedure. Flx flexus thin film stress measurement systems toho.
Zero 88 flx s lighting console user manual page 5 of 47 rigsync when flx s is first plugged into a lighting rig, rigsync will set it up automatically and continue working in the background to ensure flx s and your rig are always synchronised and problem free. Instrument accurately measures changes in the radius of curvature of substrates caused by deposition of stressed thin films on those substrates. Service handbuch schaltungen reparaturanleitung bedienungsanleitungen kostenlos pdf download. It used to be available on line from deere to look at but not any more.
Film stress and flexibility with an flx 2320 s at the boston. Refer to the glossary at the back of this manual for tifinitions of terms usd throughout. Element electronics flat panel television flx 3210. An alert against unsafe practices that may cause equipment andor property damage. For additional photos and specs, please refer to our website. The laser makes two complete passes across the wafer. Tencor flexus flx2320 thinfilm stress measurement system. In this system, curvature was measured by directing a laser at a surface with a known spatial angle. These can quickly and easily be switched between their two functions channels and playbacks by using the fader funct. Element schematic diagram service manual circuit diagram. The flexus can also measure elastic constant and thermal expansion coefficient. Mechanical properties and pattern collapse of chemically. Do not use liquid or spray detergents for cleaning. Operational procedures for the thin film stress instrument.
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